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The MRSEC Facilities Network is a nationwide partnership of NSF supported MRSEC centers designed to provide support to researchers in the broad area of Materials Research in academic, government and industrial laboratories around the world.
Reflection High-Energy Electron diffraction (RHEED) and Reflection High-Energy Electron Loss Spectroscopy (RHEELS)
The evolution of structure and morphology during CVD can be followed dynamically with the high-pressure RHEED system. This capability offers a direct window into atomistic processes occurring during CVD. For example, changes in growth-mode (e.g., cluster formation), surface structure, and surface roughness are all reflected in the quality of the RHEED pattern. With the recent addition of a RHEELS analyzer, surface composition can be determined from core-level loss features. In addition, energy filtered RHEED, discriminating against high-energy inelastic scattering, will allow for a quantitative determination of surface roughness.
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