Description

The Zygo Phase-Measurement Interference Microscope is used to measure the surface topography and micro geometry of surfaces using interference of a laser illumination to determine the height of each point in an image.

Equipment

ZYGO Corp. Maxim 3D Model 5700 with versatile metrology system that combines optical microscopy with laser interferometry. Capabilities include surface roughness and 3D topographical measurements with 0.5 Å vertical resolution and 0.25 µm horizontal resolution over lateral ranges between 10µm and 10 mm. Measurement time is ~1 second. The tallest feature that can be measured is 1.2 µm Intensity and topography data can be imported into image processing and analysis software.

Accessories

Applications

Quantification of surface roughness down to the Angstrom level, "round-off" and taper of Semiconductor wafers and hard disk platens.

Specifications

• Vertical resolution: 0.5 nm
• Lateral resolution: 0.3µm
• Vertical range: 1.2 µm
• Lateral range: 1 mm