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The MRSEC Facilities Network is a nationwide partnership of NSF supported MRSEC centers designed to provide support to researchers in the broad area of Materials Research in academic, government and industrial laboratories around the world.
Field Emission Gun Scanning Electron Microscope

Field Emission Gun Scanning Electron Microscope: Jeol 6500

Description:

Field-emission gun Scanning electron microscope (FEG-SEM) equipped with an energy dispersive spectrometer (EDS). It operates at 0.5 to 30 kV with an ultimate resolution of 1.5 nm, and a magnification range of 10x to 400,000x. Available image modes include secondary and backscattered electron images, X-Ray mapping, electron backscatter diffraction and cathodoluminescence.

Equipment:

  • JEOL 6500 with a variety of sample holders.
  • Backscattered imaging at TV rates and low voltage using the Centaurus detector.
  • Chemical analysis of bulk samples with elements as low as sodium available using a Thermo-Noran Vantage system.
  • Cathodoluminescence analysis with a Gatan (Oxford) MonoCL 2 system.
  • Crystallographic analysis with a EBSD system from HKL allowing pattern indexing and texture mapping with Channel 5 software.

Accessories:

  • Back scatter detector
  • EDS system
  • Specimen current detector
  • Electron Backscatter patterns
  • Cathodoluminescence
  • Chamberscope for optical viewing specimen in the microscope.

Applications:

  • Examination of fracture surfaces.
  • Phase identification from geological samples.
  • Examination and quantification of nano-scratch tests.
  • Stereo-imaging of surfaces.
  • Microstructure of surfactant systems.
  • Evaluation of lithographic specimens.
  • Measurement of the width of layers of magnetic read devices.
  • Characterization of grain boundaries of ceramics.

Capabilities:

  • Sample size: 50 x 125 x 125 mm
  • Lateral resolution: 1.5 nm
  • Lateral range: 50 mm x 50 mm
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