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The MRL x-ray facility has two Panalytical MRD PRO high-resolution
x-ray diffractometers for measuring high quality epitaxial thin
films grown on substrates, which include a wide variety of electronic,
optoelectronic and photonic materials. The instruments are routinely
used for high precision lattice parameter
determination, rocking curves, super lattice from multilayers, glancing
incidence x-ray diffraction and x-ray reflectivity. In its triple axes
configuration, the instrument has an intrinsic resolution of ~5 arcsec,
making
them well suited for measurements on near perfect crystals.
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Radiation Enclosure
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Inside View
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- X-ray
sources: 18 kW Rigaku rotating anode
generator & 2.2 kW Philips sealed
tube source - Wavelength:
Cu Ka
(1.5405 Ã…)
- Monochromator:
High flux hybrid monochromator or 4-crystal Ge(220)/(440)
- Diffracted
beam optics: receiving slits & Ge (220) analyzer for triple axes
- Goniometer:
open Eulerian cradle
- Detector:
sealed proportional counter
- Resolution:
~5 arcsec in q
and 2q-q
scans
- Software
for data acquisition: Philips X’PERT Data Collector
- Software
for data processing: Philips X’PERT Epitaxy Â
Example of XRD data collected on MRD
GaN (002) rocking curve with superlattice peaks
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