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Kratos Axis Ultra XPS system
Purchased in 2001, the Kratos Ultra combines fast, high-sensitivity XPS
(X-Ray Photoelectron Spectrometry) with a unique "real-time" imaging
capability that allows us to quickly produce 2-dimensional
chemical-state maps with spatial resolution as fine as 5 microns. The
system also provides state-of-the-art charge compensation for
non-conductive specimens. Spectra can be taken from areas as small as
15 microns in diameter. In wide-area scans, most elements other than
hydrogen and helium can be detected down to approximately 0.1%.
XPS offers a quantitative determination the elemental composition of the
top 50 to 70 Angstroms of solid specimens. High-resolution scans can
then be taken of elemental peaks of interest, and peak shifts can be
used to determine chemical bonding information. In addition, specimens
can be tilted to provide a shallower analysis, emphasizing the top 15
to 20 Angstroms. The system is also equipped with a cold stage, and an
Ar ion gun for cleaning and depth profiling. Three X-ray sources are
available: monochromated Al, and non-monochromated Mg and Al.
Specification: www.kratos.com
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