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The MRSEC Facilities Network is a nationwide partnership of NSF supported MRSEC centers designed to provide support to researchers in the broad area of Materials Research in academic, government and industrial laboratories around the world.
Scanning Electron Microscopes

JEOL6300F Scanning Microscope.

The JEOL6300F scanning microscope uses a field emission gun with cold cathode, the highest coherent source available for a commercial microscope. The resolution is 1.5 nm in secondary electron imaging (SEI) and 3.0 nm in backscattered electron imaging (BEI) when the microscope is operated at 30 kV, the highest voltage for this microscope. A multi-purpose specimen chamber has an eucentric goniometer stage of (50 x 70 mm) in X-Y movement, 360° rotation and a maximum tilt angle of 60°. The airlock specimen chamber allows up to 32 mm-in-diameter specimens to exchange, and the size can also be up to 150 mm when the exchange is carried out without the airlock. In addition to a Polaroid camera, a computer station is attached for image on-line processing. Auto functions in focusing, astigmatism correction, and brightness-contrast adjustment are available. New attachments: (1) Oxford Inca x-ray system; (2) Oxford CL2 cathodoluminescence system.

Specification: www.jeol.com

JEOL6340 FEG Digital Scanning Microscope

JEOL6340F microscope is equipped with a cold field emission cathode operated at 0.5 to 30 kV. The secondary electron image resolution is 1.2 nm at 15 kV and 2.5 nm at 1 kV that is resulted from an electromagnetic 4-lens system with a semi-in-lens objective lens that is designed for the smallest possible aberrations. Images are displayed with 1280x1024x8 pixels on a PC and the maximum resolution is 2048x2048

FEI XL40 Sirion FEG Digital Scanning Microscope

High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size).

Scanning Probe Microscopy

The scanning probe microscope (SPM) operates exactly as its name implies: a sharp tip is scanning on sample surface in a controlled contact or non-contact mode, and the signals carrying surface information are collected, processed and then plotted on a computer screen. The first base of SPM was scanning tunneling microscope (STM) that was invented 1982. After that, it has also been found not only the tunneling current, but also the atomic force and other kinds of interactions in between tip and sample surface can be probed. Therefore, the category of SPM samples is greatly extended from conducting to non-conducting or soft materials since the tip can work just in a near-surface scan. The name of scanning probe microscopy summarizes scanning tunneling microscopy, atomic force microscopy (AFM), scanning capacitance microscopy (SCM), magnetic force microscopy (MFM) as well as a range of other measuring techniques.

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