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The MRSEC Facilities Network is a nationwide partnership of NSF supported MRSEC centers designed to provide support to researchers in the broad area of Materials Research in academic, government and industrial laboratories around the world.
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FEI DB235 Dual-Beam Focus Ion Beam System
DB235 is small stage system combining a Hexalens electron column and a Magnum
ion column for failure analysis and high-end sample preparation. A Schottkey
emitter is used for scanning electron microscopy (SEM) under 200 – 300 kV,
while Gallium liquid metal is for focus ion beam (FIB) operated at 5 to 30 kV
in a current range of 1pA to 20 nA. 3D imaging can be carried out by using
these two beams arranged in 52°-tilt angle. The resolution is 3 nm for SEM and
7 nm for FIB. This system is controlled under Window NT system and
this machine is oriented for TEM sample preparation.
Specification: www.feicompany.com
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